The future ceramic micro processing based on tape stacking requires the development of inspection systems toperform high-resolution in-process quality control of embedded manufactured cavities, metal structures anddefects. This paper presents non-destructive techniques for monitoring processes and controlling the differentsteering parameters. Results are shown for optical coherence tomography (OCT), IR-transmission and reflectionmeasurement, and X-ray micro computed tomography. Suitable working conditions are analyzed to improve thedetection performance.
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